International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub
Date

Stability

Date

SC 47F01Y. IsonoCCDV2015-122019

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/153/NP pdf file 1098 kB
2013-04-03 
ANW
47F/164/RVN pdf file 43 kB
2013-07-102013-08-31
1CD
47F/178/CD pdf file 707 kB
2013-11-202013-11-30
ACDV
47F/199/CC doc file 168 kB
pdf file 171 kB
2014-08-122014-03-31
CCDV
47F/200/CDV
pdf file 712 kB
pdf file 783 kB
2014-10-242014-11-30
ADIS
 2015-04-30
DEC
 2015-05-31

Project

IEC 62047-26 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures

 

Remark:

Project plan - CDV: 2014-12, FDIS: 2015-10