International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Z. Dacheng | ANW | 2015-12 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||
|---|---|---|---|---|---|---|
| PNW |
| 2012-11-16 | ||||
| ANW |
| 2013-03-27 | 2013-03-31 | |||
| 1CD | 2013-11-30 | |||||
326 kBProject
IEC 62047-25 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area
Remark:
Project plan - CDV: 2014-12, FDIS: 2015-10