International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Dr. J-H. Kim & Dr. H-J. Lee | ACDV | 2014-06 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2011-07-29 | ||||||
| ANW |
| 2011-12-02 | 2011-12-15 | |||||
| 1CD |
| 2012-08-06 | 2012-07-31 | |||||
| CDM |
| 2012-10-16 | ||||||
| ACDV |
| 2012-12-03 | 2012-11-30 | |||||
| CCDV | 2013-02-28 | |||||||
950 kB
121 kBProject
IEC 62047-21 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Remark:
Project plan - CDV: 2013-03, FDIS: 2014-03 Relevant docs: IEC 62047-8, Micro-electromechanical devices Part 8: Strip bending test method for tensile property measurement of thin films