International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub

Date

Stability

Date

SC 47F01J-H. Kim and H-J. LeePPUB2014-062017

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/95/NP pdf file 950 kB
2011-07-29 
ANW
47F/111/RVN pdf file 123 kB
2011-12-022011-12-15
1CD
47F/127/CD pdf file 1380 kB
2012-08-062012-07-31
CDM
47F/136/CC doc file 121 kB
pdf file 133 kB
47F/136A/CC doc file 130 kB
pdf file 161 kB
2012-10-16 
ACDV
47F/136/CC doc file 121 kB
pdf file 133 kB
47F/136A/CC doc file 130 kB
pdf file 161 kB
2012-12-032012-11-30
CCDV
47F/147/CDV pdf file 34 kB
47F/147A/CDV pdf file 218 kB
pdf file 224 kB
2013-04-032013-02-28
ADIS
47F/171/RVC doc file 94 kB
pdf file 54 kB
2013-08-302013-10-15
DEC
2014-01-212013-12-31
RDIS
2014-01-282014-02-15
CDIS
47F/185/FDIS

2014-03-142014-04-30
APUB
47F/189/RVD pdf file 45 kB
2014-05-202014-05-15
BPUB
2014-05-212014-05-31
PPUB
2014-06-192014-06-30

Project

IEC 62047-21 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

 

Remark:

Project plan - CDV: 2013-03, FDIS: 2014-03 Relevant docs: IEC 62047-8, Micro-electromechanical devices Part 8: Strip bending test method for tensile property measurement of thin films