International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Dr.Yakichi Higo | RDIS | 2013-09 | 2017 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2010-02-26 | ||||||
| ANW |
| 2010-06-25 | 2010-07-15 | |||||
| 1CD |
| 2011-02-18 | 2010-11-30 | |||||
| CDM |
| 2011-09-08 | ||||||
| ACDV |
| 2011-12-02 | 2011-11-30 | |||||
| CCDV |
| 2012-02-29 | 2012-03-31 | |||||
| ADIS |
| 2012-11-22 | 2012-10-31 | |||||
| DEC | 2013-02-19 | 2013-01-31 | ||||||
| RDIS | 2013-02-21 | 2013-03-15 | ||||||
| CDIS | 2013-05-31 | |||||||
| APUB | 2013-07-31 | |||||||
| BPUB | 2013-08-15 | |||||||
| PPUB | 2013-09-15 | |||||||
334 kB
141 kBProject
IEC 62047-18 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
Remark:
Project plan: CDV: 2011-10 FDIS: 2012-09 IS: 2013-02