International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Chung-Seog Oh / Hak-Joo LEE | ADIS | 2013-06 | 2016 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2009-07-03 | ||||||
| ANW |
| 2009-10-16 | 2009-11-30 | |||||
| 1CD |
| 2010-03-05 | 2010-01-31 | |||||
| A2CD |
| 2010-06-18 | 2010-07-31 | |||||
| 2CD |
| 2010-07-30 | 2010-07-31 | |||||
| CDM |
| 2011-04-29 | 2010-11-15 | |||||
| A3CD |
| 2011-05-12 | 2011-11-30 | |||||
| 3CD |
| 2011-05-13 | 2011-05-31 | |||||
| CDM |
| 2011-09-08 | ||||||
| ACDV |
| 2011-12-02 | 2011-11-30 | |||||
| CCDV |
| 2011-12-22 | 2012-03-31 | |||||
| ADIS |
| 2012-11-29 | 2012-08-31 | |||||
| DEC | 2013-01-31 | |||||||
564 kB
166 kBProject
IEC 62047-11 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials
Remark:
CD: 2010-01 CDV: 2010-09 FDIS: 2011-08