International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub

Date

Stability

Date

SC 47F01C-S OhDEL  

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/5/NP pdf file 926 kB
2008-08-22 
DEL
47F/21/RVN pdf file 281 kB
2009-06-262009-01-15

Project

PNW 47f-5 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials (Future IEC 62047-11)

 

Remark:

Project plan: CD: 2009-12, IS: 2011-12. Relevant documents to be considered: IEC 62047-1, -2, -3 and ASTM E228-95, ASTM E289-99.