International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub
Date

Stability

Date

SC 47F01J-H. KimDEL  

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/4/NP pdf file 194 kB
2008-08-22 
DEL
47F/20/RVN pdf file 264 kB
2009-06-262009-01-15

Project

PNW 47f-4 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Future IEC 62047-10)

 

Remark:

Project plan: CD: 2009-12, IS: 2011-12. Relvant documents to be considered: IEC 620047-1, -2, -3 and .