International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub

Date

Stability

Date

SC 47F01J. WeixuanDEL  

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/139/NP  
2012-11-16 
DEL
47F/157/RVN  
2013-04-302013-03-31

Project

PNW 47F-139 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 23: General rules for the assessment of micro-geometrical parameters

 

Remark:

Project plan - CD: 2013-04, IS: 2015-12