International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub

Date

Stability

Date

SC 47F01Prof. Toshiyuki TsuchiyaPPUB2011-092016

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/16/NP pdf file 426 kB
2009-02-27 
ANW
47F/18/RVN pdf file 9 kB
47F/18A/RVN pdf file 79 kB
2009-06-122009-07-15
1CD
47F/43/CD pdf file 845 kB
2010-01-222009-11-30
A2CD
47F/52/CC doc file 146 kB
pdf file 242 kB
47F/52A/CC doc file 149 kB
pdf file 63 kB
2010-05-142010-05-31
ACDV
47F/52/CC doc file 146 kB
pdf file 242 kB
47F/52A/CC doc file 149 kB
pdf file 63 kB
2010-07-232010-09-30
CCDV
47F/64/CDV pdf file 422 kB
2010-08-062010-09-30
ADIS
47F/74/RVC pdf file 207 kB
2011-02-172011-04-15
DEC
2011-02-182011-02-28
RDIS
2011-02-242011-03-15
CDIS
47F/80/FDIS

2011-03-252011-05-31
APUB
47F/90/RVD pdf file 206 kB
2011-06-102011-05-31
BPUB
2011-06-112011-06-15
PPUB
2011-09-132011-07-15

Project

IEC 62047-12 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

 

Remark:

CDV:2010-10 FDIS:2011-09