International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Dr Nak-Kyu Lee Dr Hye-Jin Lee | PPUB | 2012-03 | 2016 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2009-10-30 | ||||||
| ANW |
| 2010-02-26 | 2010-03-15 | |||||
| 1CD |
| 2010-07-16 | 2010-08-31 | |||||
| CDM |
| 2010-09-24 | 2010-10-31 | |||||
| ACDV |
| 2010-11-12 | 2010-11-30 | |||||
| CCDV |
| 2010-11-19 | 2010-11-30 | |||||
| ADIS |
| 2011-08-25 | 2011-07-31 | |||||
| DEC | 2011-10-11 | 2011-10-30 | ||||||
| RDIS | 2011-10-12 | 2011-10-31 | ||||||
| CDIS |
| 2011-11-24 | 2012-01-15 | |||||
| APUB |
| 2012-02-06 | 2012-01-31 | |||||
| BPUB | 2012-02-07 | 2012-02-15 | ||||||
| PPUB | 2012-02-28 | 2012-03-15 | ||||||
738 kB
201 kBProject
IEC 62047-14 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
Remark:
CDV: 2011-08 FDIS: 2012-04 2012-12