International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub

Date

Stability

Date

SC 47F01Dr Nak-Kyu Lee Dr Hye-Jin LeePPUB2012-032016

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/37/NP pdf file 738 kB
2009-10-30 
ANW
47F/45/RVN pdf file 326 kB
47F/45A/RVN pdf file 293 kB
2010-02-262010-03-15
1CD
47F/59/CD pdf file 680 kB
2010-07-162010-08-31
CDM
47F/69/CC doc file 201 kB
pdf file 259 kB
47F/69A/CC doc file 193 kB
pdf file 83 kB
2010-09-242010-10-31
ACDV
47F/69/CC doc file 201 kB
pdf file 259 kB
47F/69A/CC doc file 193 kB
pdf file 83 kB
2010-11-122010-11-30
CCDV
47F/70/CDV pdf file 372 kB
2010-11-192010-11-30
ADIS
47F/99/RVC doc file 121 kB
pdf file 83 kB
2011-08-252011-07-31
DEC
2011-10-112011-10-30
RDIS
2011-10-122011-10-31
CDIS
47F/108/FDIS

2011-11-242012-01-15
APUB
47F/118/RVD pdf file 420 kB
2012-02-062012-01-31
BPUB
2012-02-072012-02-15
PPUB
2012-02-282012-03-15

Project

IEC 62047-14 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials

 

Remark:

CDV: 2011-08 FDIS: 2012-04 2012-12