International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | C-S Oh | DEL |
History
Stage | Document | Downloads | Decision Date | Target Date | ||
|---|---|---|---|---|---|---|
| PNW |
| 2008-08-22 | ||||
| DEL |
| 2009-06-26 | 2009-01-15 | |||
926 kBProject
PNW 47f-5 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials (Future IEC 62047-11)
Remark:
Project plan: CD: 2009-12, IS: 2011-12. Relevant documents to be considered: IEC 62047-1, -2, -3 and ASTM E228-95, ASTM E289-99.