International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | WG1 | Prof.Sekwang PARK | DEL |
History
Stage | Document | Downloads | Decision Date | Target Date | ||
|---|---|---|---|---|---|---|
| PNW |
| 2009-10-30 | ||||
| DEL |
| 2010-03-12 | 2010-03-15 | |||
413 kBProject
PNW 47F-39 Ed. 1.0
(Future IEC 62047-16): Semiconductor devices -Micro-electromechanical devices - Part 16: Test method forresidual stress measurement
Remark:
CD: 2010-02 IS: 2012-12