International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | Kuniki OHWADA | PPUB | 2009-04 | 2015 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2006-05-26 | ||||||
| ANW |
| 2006-09-22 | 2006-10-15 | |||||
| ANW |
| 2006-12-08 | ||||||
| 1CD |
| 2007-03-02 | 2007-03-31 | |||||
| ACDV |
| 2007-07-27 | 2007-07-31 | |||||
| CCDV |
| 2007-11-02 | 2007-08-31 | |||||
| ADIS |
| 2008-04-25 | 2008-07-15 | |||||
| DEC | 2008-10-20 | 2008-12-15 | ||||||
| RDIS | 2008-10-28 | 2008-11-15 | ||||||
| CDIS |
| 2009-01-16 | 2009-01-31 | |||||
| APUB |
| 2009-03-27 | 2009-03-31 | |||||
| BPUB | 2009-03-28 | 2009-03-31 | ||||||
| PPUB | 2009-04-07 | 2009-04-30 | ||||||
272 kBProject
IEC 62047-6 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
Remark:
- Targets: CD:2007-03, CDV:2007-12, FDIS:2008-12 - cc: 47E, 56, 91, 101 - Transferred from TC 47/WG 4