International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Kuniki OHWADA | PPUB | 2006-10 | 2015 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2003-07-11 | ||||||
| ANW |
| 2003-10-24 | 2003-11-30 | |||||
| 1CD |
| 2004-04-09 | 2004-03-31 | |||||
| ACDV |
| 2004-07-30 | 2004-08-31 | |||||
| CCDV |
| 2005-03-18 | 2005-01-31 | |||||
| CCDV |
| 2005-05-27 | 2005-03-31 | |||||
| ADIS |
| 2005-11-25 | 2005-11-30 | |||||
| DEC | 2006-03-01 | 2006-03-31 | ||||||
| RDIS | 2006-03-08 | 2006-03-31 | ||||||
| CDIS |
| 2006-05-19 | 2006-06-15 | |||||
| APUB |
| 2006-07-24 | 2006-08-15 | |||||
| BPUB | 2006-07-25 | 2006-09-15 | ||||||
| PPUB | 2006-08-15 | 2006-10-15 | ||||||
177 kBProject
IEC 62047-3 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
Remark:
- Transferred from TC 47/WG4 - FR to be done at FDIS -email 2005-03-11-then FR rcvd 05-05-11