International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub
Date

Stability

Date

SC 47F01Z. Dacheng1CD2015-12 

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/141/NP pdf file 326 kB
2012-11-16 
ANW
47F/152/RVN pdf file 76 kB
47F/152A/RVN pdf file 103 kB
2013-03-272013-03-31
1CD
47F/183/CD pdf file 381 kB
2013-12-272013-11-30
A2CD
 2014-05-31

Project

IEC 62047-25 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon-based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area

 

Remark:

Project plan - CDV: 2014-12, FDIS: 2015-10