International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub
Date

Stability

Date

SC 47F01S. Park and J-S. ParkCCDV2015-032017

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/107/NP pdf file 713 kB
2011-09-30 
ANW
47F/116/RVN pdf file 25 kB
47F/116A/RVN pdf file 192 kB
2012-01-112012-02-15
1CD
47F/125/CD pdf file 437 kB
2012-07-272012-07-31
CDM
47F/134/CC doc file 228 kB
pdf file 204 kB
47F/134A/CC doc file 261 kB
pdf file 270 kB
2012-10-02 
A2CD
47F/134/CC doc file 228 kB
pdf file 204 kB
47F/134A/CC doc file 261 kB
pdf file 270 kB
2012-12-052012-11-30
2CD
47F/151/CD pdf file 474 kB
2013-03-222013-02-28
ACDV
47F/170/CC doc file 102 kB
pdf file 70 kB
2013-08-302013-06-30
CCDV
47F/181/CDV
pdf file 379 kB
pdf file 349 kB
2014-02-062013-12-31
ADIS
 2014-08-15
DEC
 2014-09-15

Project

IEC 62047-16 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films?wafer curvature and cantilever beam deflection methods

 

Remark:

Project plan - CDV: 2013-01, FDIS: 2014-01