International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Prof. Toshiyuki Tsuchiya | PPUB | 2011-09 | 2016 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2009-02-27 | ||||||
| ANW |
| 2009-06-12 | 2009-07-15 | |||||
| 1CD |
| 2010-01-22 | 2009-11-30 | |||||
| A2CD |
| 2010-05-14 | 2010-05-31 | |||||
| ACDV |
| 2010-07-23 | 2010-09-30 | |||||
| CCDV |
| 2010-08-06 | 2010-09-30 | |||||
| ADIS |
| 2011-02-17 | 2011-04-15 | |||||
| DEC | 2011-02-18 | 2011-02-28 | ||||||
| RDIS | 2011-02-24 | 2011-03-15 | ||||||
| CDIS |
| 2011-03-25 | 2011-05-31 | |||||
| APUB |
| 2011-06-10 | 2011-05-31 | |||||
| BPUB | 2011-06-11 | 2011-06-15 | ||||||
| PPUB | 2011-09-13 | 2011-07-15 | ||||||
426 kB
146 kBProject
IEC 62047-12 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Remark:
CDV:2010-10 FDIS:2011-09