International Standards and Conformity Assessment for all electrical, electronic and related technologies

SC 47F

Micro-electromechanical systems

 

Detail

Committee
Working Groups
Project Leader

Current

Status

Frcst Pub

Date

Stability

Date

SC 47F01Chung-Seog Oh / Hak-Joo LEEPPUB2013-072018

History

Stage
Document
Downloads
Decision Date
Target Date
PNW
47F/23/NP PDF file 564 kB
2009-07-03 
ANW
47F/35/RVN PDF file 310 kB
47F/35A/RVN PDF file 306 kB
2009-10-162009-11-30
1CD
47F/49/CD PDF file 697 kB
2010-03-052010-01-31
A2CD
47F/55/CC Word file 166 kB
PDF file 357 kB
47F/55A/CC Word file 170 kB
PDF file 252 kB
2010-06-182010-07-31
2CD
47F/62/CD PDF file 1786 kB
2010-07-302010-07-31
CDM
47F/84/CC Word file 205 kB
PDF file 322 kB
47F/84A/CC PDF file 142 kB
2011-04-292010-11-15
A3CD
47F/84/CC Word file 205 kB
PDF file 322 kB
47F/84A/CC PDF file 142 kB
2011-05-122011-11-30
3CD
47F/86/CD PDF file 3650 kB
2011-05-132011-05-31
CDM
47F/100/CC Word file 116 kB
PDF file 123 kB
47F/100A/CC Word file 122 kB
PDF file 127 kB
2011-09-08 
ACDV
47F/100/CC Word file 116 kB
PDF file 123 kB
47F/100A/CC Word file 122 kB
PDF file 127 kB
2011-12-022011-11-30
CCDV
47F/113/CDV PDF file 1660 kB
PDF file 1838 kB
47F/113F/CDV PDF file 1838 kB
2011-12-222012-03-31
ADIS
47F/143/RVC PDF file 34 kB
47F/143A/RVC PDF file 131 kB
2012-11-292012-08-31
DEC
2013-02-202013-01-31
RDIS
2013-02-212013-03-15
CDIS
47F/154/FDIS

2013-04-242013-05-31
APUB
47F/161/RVD PDF file 46 kB
2013-07-012013-06-30
BPUB
2013-07-022013-07-15
PPUB
2013-07-172013-08-15

Project

IEC 62047-11 Ed. 1.0

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

 

Remark:

CD: 2010-01 CDV: 2010-09 FDIS: 2011-08