International
Electrotechnical
Commission
International Standards and Conformity Assessment
for all electrical, electronic and related technologies
SC 47F |
Micro-electromechanical systems |
Detail
Committee | Working Groups | Project Leader | Current Status | Frcst Pub Date | Stability Date |
|---|---|---|---|---|---|
| SC 47F | 01 | Kuniki OHWADA | PPUB | 2014 |
History
Stage | Document | Downloads | Decision Date | Target Date | ||||
|---|---|---|---|---|---|---|---|---|
| PNW |
| 2002-07-05 | ||||||
| ANW |
| 2002-11-29 | 2002-11-30 | |||||
| 1CD |
| 2003-04-04 | 2003-04-30 | |||||
| CDM |
| 2003-09-05 | 2003-08-31 | |||||
| ACDV | 2003-10-27 | 2003-11-30 | ||||||
| CCDV |
| 2004-04-09 | 2004-03-31 | |||||
| CDVM |
| 2004-09-24 | 2004-10-31 | |||||
| ADIS |
| 2005-01-14 | 2004-11-30 | |||||
| DEC | 2005-03-31 | 2005-03-31 | ||||||
| RDIS | 2005-04-05 | 2005-04-30 | ||||||
| CDIS |
| 2005-06-17 | 2005-07-15 | |||||
| APUB |
| 2005-09-20 | 2005-10-15 | |||||
| BPUB | 2005-09-21 | 2005-11-15 | ||||||
| PPUB | 2005-09-27 | 2005-12-15 | ||||||
561 kBProject
IEC 62047-1 Ed. 1.0
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Remark:
- Transferred from TC 47/WG4 - Project no.is being re-used (previous one was deleted - decision at Beijing 2002-10-28)