International Standards and Conformity Assessment
for all electrical, electronic and related technologies
TC 113 |
Nanotechnology standardization for electrical and electronic products and systems |

Project Leader | National Committee | |
|---|---|---|
Mr Harald Bosse | DE | |
Member | National Committee |
|---|---|
| Ms Jennifer Decker | CA |
| Mr Valeriy Gavrilenko | RU |
| Mr Thomas A Germer | US |
| Mr Axel Peter Mustad | NO |
| Mr Emilio Prieto | ES |
| Mr Wang Qixiang | CN |
| Mr Alexander V. Rakov | RU |
| Mrs Nataly A. Shlamkova | RU |
| Mr Evgeny A. Titov | RU |
| Mr Pavel A. Todua | RU |
Title & Task
JPT 62622
Artificial gratings used in nanotechnology: Description and measurement of dimensional quality parameters



